Excessive Efficiency R-Theta 2-Axis Levels for Nanometer Precision Movement in Semiconductor and Laser Processing Purposes

Excessive Efficiency R-Theta 2-Axis Levels for Nanometer Precision Movement in Semiconductor and Laser Processing Purposes

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R-Theta stage movement methods are higher suited to round, elliptic and spiral movement patterns than typical Cartesian 2-axis XY linear translation phases.

Excessive Efficiency R-Theta 2-Axis Levels for Nanometer Precision Movement in Semiconductor and Laser Processing Purposes

Picture Credit score: PI (Physik Instrumente) LP

PI Gives Three Lessons of R-Theta Levels

  1. For the best efficiency and precision, Air Bearing linear phases and air bearing rotary tables are used.
  2. Hybrid R-Theta methods use linear motor pushed phases with mechanical bearings and direct-drive air bearing rotary tables.
  3. Direct Drive linear motor phases and direct drive rotary tables with mechanical bearings are additionally obtainable.

R-Theta methods typically discover purposes in precision laser / semiconductor purposes on account of greater throughput, greater precision and smaller footprint. Watch video of an all air bearing R-Theta phases.

Excessive Pace Movement Controllers

The phases are operated by PI’s ACS-based industrial movement controllers with ultra-fast triggers for synchronization with exterior gear comparable to cameras, sensors or lasers. The quick controllers permit extremely exact triggering with 0.01% time tolerance between alerts. Set off alerts could be derived off absolute encoders or analog alerts (sin/cos encoder), enabling greater precision, safer, and simplified options as in comparison with outdated digital encoder-only triggers. With the trendy PI movement controllers, a set off in an R-Theta configured system will work simply in addition to an XY place set off, with the coordinate specs merely outlined in polar coordinates.

Learn article on R-Theta phases

Working with You

PI’s in-house engineered options have enabled clients all over the world to extend their productiveness and technological benefit for five many years. With a big foundation of confirmed movement applied sciences and methodologies, PI is within the place to rapidly modify current designs or present a completely personalized OEM resolution to suit the precise necessities of your software from sensors and piezo transducers to microscope nano-focus items, quick photonics alignment methods to multi-axis automation sub-systems.

Supply: http://www.pi-usa.us/en/

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